Silicon Wafer Direct-Bonding Technique and Bonded Interface.
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چکیده
منابع مشابه
Hydrophobic silicon wafer bonding
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ژورنال
عنوان ژورنال: Bulletin of the Japan Institute of Metals
سال: 1992
ISSN: 0021-4426,1884-5835
DOI: 10.2320/materia1962.31.304